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Spin coating and plasma process for 2.5 D integrated photonics on multilayer polymers,
A. Zebda, L. Camberlein, B. Bêche, E. Gaviot, E. Bêche, D. Duval, J. Zyss, G. Jézéquel, F. Solal, C. Godet,Thin Solid Films, vol. 516, pp.8668-8674 (2008).
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