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Optical lithography of three-dimensional magnetophotonic microdevices

Dam Thuy Trang Nguyen, Olivia Del Guercio, Thi Huong Au, Duc Thien Trinh, Nguyen Phuong Thao Mai, and Ngoc Diep Lai, Optical Engineering, 57(4), 041406 (2018). doi:10.1117/1.OE.57.4.041406

We have recently demonstrated a simple and low-cost fabrication technique, called low one-photon absorption direct laser writing, to realize desired polymeric microstructures. We present the use of this technique for fabrication of three-dimensional magnetophotonic devices on a photocurable homogeneous nanocomposite consisting of magnetite (Fe3O4) nanoparticles and a commercial SU8 photoresist. The fabricated magnetophotonic microstructures show strong response to an applied external magnetic field. Thus, various three-dimensional submicromechanical magnetophotonic devices, which can be mechanically driven by magnetic force, are designed and created. Potential applications of these devices are also discussed.

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