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LOPA-based direct laser writing of multi-dimensional and multi-functional photonic submicrostructures

Fei Mao, Quang Cong Tong, Dam Thuy Trang Nguyen, Au Thi Huong, Rache Odessey, Florent Saudrais, Ngoc Diep Lai, Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 1011509 (2017); doi:10.1117/12.2253741

We have recently developed a simple fabrication technique, called low one-photon absorption (LOPA) direct laser writing (DLW), to realize multi-dimensional and multi-functional polymer-based photonic submicrostructures. This technique employs a continuous-wave laser at 532 nm-wavelength with only few milliwatts and a simple optical setup, allowing to decrease the cost of the fabrication system by a factor of ten as compared to a commercial DLW system. In this report, we present various photonic structures, such as 2D and 3D micro- resonators, photonic and magnetic submicrostructures, and nonlinear optical structures fabricated by this LOPA- based DLW method. We also discuss about potential applications of those fabricated multi-dimensional and multi-functional photonic submicrostructures in opto-electronics, bio, as well as in opto-mechanics. © (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

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